While no one other than google will be able to tell you for sure, I'd say it is very unlikely that 5% or so is anything to worry about it. A few people I know who were clickbombed literally saw hundreds of clicks (well into the double figures CTR).
'Bypass' will give much better ads (and better paying ones as they often relate to health bypasses) in my experience. 'Proxy' tends to bring up very low paying ads that people don't click on. There is a invalid click form you can fill out at adsense:

https://www.google.com/adsense/support/b...ks_contact

They will normally send you a standard email back, but if there is a problem they do tend to be more understanding if you have sent this form in. The other thing to remember is that your impressions might have a lag in updating, which could make the CTR seem higher than it actually is (until everything updates). But you might as well submit that form, but enjoy the improved ads as I am pretty sure thats what is probably behind it!
JB

Swank Wrote:Hmm all I ever changed was adding in a bypass keyword to the keywords meta tag and changing the words poxy to bypass. Could that have led to the increase in CTR? I don't know I am emailing google later to have them check it out. I was using tech same templates all along, the only explanation for the increase in CTR for me is better attractive ads appeared or I got click bombed.

Hmm but the strange thing is ever since I changed my keyword the revenue and CTR tripled then on the 3rd day the revenue dropped to 3 cents per click when previously it could reach up to $2+ per click.

Thank you BigJonny for your advice. If I submit to that form and while they are checking on it, would I have to take down my ads in the meantime or just leave them as it is?

Also if I do not submit that form and if it does happened to be a click bomb and invalid clicks, would google disable my account or will they give me a warning first? ( Never received any warning before)

Google are very unpredictable when it comes to invalid clicks. I have never had a warning, but know of people who have. I also know of people who have been banned without warning. It may have something to do with how substantial their evidence is/what kind of standing they view your account in.
When I have submitted forms in the past I have never taken ads off, afterall - I have told them that there might be a problem. I have never had a personalised response though, just a generic 'we'll look into it' type response after 24 hours or so.
CTR could go up with better ads with higher revenue, but rates may have dropped later on due to poor conversion etc. You might still be displaying more appropriate ads (or ads that your users are interested in), but the advertiser might be less willing to pay such a high amount for your traffic. Just the way adsense works. I regularly find I go from high clicks to clicks worth a few cents, then back again and so on. Just part of the unpredictable adsense fun.
Hope you've managed to get it sorted.
JB

Mm ok very good advice, I am submitting a form to google now. Thanks for all the advice, really appreciate it Havta set up a proper rep system soon.

I wish that would happen to my site, you shouldn't need to worry.